摘要
组合设备是半导体晶圆制造的核心装备,其调度与控制优化是半导体制造领域极具挑战性的课题. Petri网因其强大的建模能力和简约的图形化表达优势,被广泛地应用于组合设备的建模与调度.对基于Petri网的组合设备建模与调度方法进行综述,归纳总结了组合设备的结构类型、晶圆流模式、调度策略及Petri网建模方法,并系统阐述组合设备的7类典型调度问题,包括驻留时间约束、作业时间波动、晶圆重入加工、多品种晶圆加工、加工模块(Process module, PM)故障、PM清洗和组合设备群.最后,讨论了当前组合设备调度存在的挑战及后续可能的研究方向.
Cluster tools are the core equipment of semiconductor wafer manufacturing.Their scheduling and controlling are challenging topics in the field of semiconductor manufacturing.Petri nets have the advantages of powerful modeling capacity and simple graphical descriptions.They are thus widely used in modeling and scheduling of cluster tools.This paper summarizes the research on cluster tools modeling and scheduling based on Petri nets.It presents structures and types of cluster tools,wafer flow patterns,scheduling strategy,and Petri net-based methods.It also addresses seven typical scheduling problems of cluster tools,including wafer residency time constraints,activity time variation,wafer revisiting,multi-type wafer flow patterns,process module(PM)failure,PM cleaning,and multi-cluster tools.Finally,the challenges existing in the cluster tools scheduling field and some possible future research directions are given.
作者
袁凤连
黄波
王际鹏
潘春荣
YUAN Feng-Lian;HUANG Bo;WANG Ji-Peng;PAN Chun-Rong(School of Computer Science and Engineering,Nanjing University of Science and Technology,Nanjing 210094;School of Mechanical Engineering,Hubei University of Technology,Wuhan 430068;School of Mechanical and Electrical Engineering,Jiangxi University of Science and Technology,Ganzhou 341000)
出处
《自动化学报》
EI
CAS
CSCD
北大核心
2023年第5期929-948,共20页
Acta Automatica Sinica
