摘要
ASPEX全自动夹杂物分析仪对试样检测面的平行度和清洁度均有较高要求。通过对已有的扫描电镜类夹杂物分析用试样制备工艺进行改进,增加了冲洗、清抛、清洁等工艺步骤,并严格规范了试样安装步骤,确定了合理的ASPEX全自动夹杂物分析仪试样制备工艺。结果表明:使用该工艺制备的试样质量稳定,能够满足ASPEX全自动夹杂物分析仪全自动分析要求,改进后ASPEX全自动夹杂物分析仪对夹杂物自动识别的准确率由原来的54.43%提高到97.05%。
The ASPEX automatic inclusion analyzer has high requirements for the parallelism and cleanliness of the specimen testing surface.Through improving the existing specimen preparation process for scanning electron microscope,adding flushing,water polishing and cleaning process,and strictly regulating the specimen installation procedure,a reasonable specimen preparation process for ASPEX automatic inclusion analyzer was determined.The results show that the specimens prepared by this process are of stable quality,and can meet the automatic analysis requirements of ASPEX automatic inclusion analyzer.After the improvement,the accuracy rate of the inclusion automatic recognition by the ASPEX automatic inclusion analyzer increased from 54.43%to 97.05%.
作者
张敬蕊
胡庆利
赵乃胜
周志超
杨艳龙
ZHANG Jingrui;HU Qingli;ZHAO Naisheng;ZHOU Zhichao;YANG Yaniong(Beijing Shougang Co.,Ltd.,Qian＇an 064400,China)
出处
《理化检验（物理分册）》
CAS
2018年第10期712-715,共4页
Physical Testing and Chemical Analysis(Part A:Physical Testing)
