摘要
多晶硅产品质量取决于原料质量、设备状态、工艺方法多方面因素的影响。
The quality of polysilicon products depends on many factors such as the quality of raw materials,equipment status,and process methods.
作者
潘锦
佟峰
Pan Jin;Tong Feng(Jiangsu Zhongneng Silicon Technology Development CO.,LTD.,Jiangsu,221004)
出处
《当代化工研究》
2018年第8期108-109,共2页
Modern Chemical Research
关键词
多晶硅
原料
设备
质量
poly silicon
raw materials
equipment
quality
