摘要
介绍了DELTA-F库仑式微量氧分析仪的分析原理、结构特点及其在多晶硅生产中的应用情况。通过对取样管线的改进,解决了测量中存在的问题,更好的满足了生产需求。
This paper introduced the principle and the structure of the DELTA-F coulomb micro oxygen analyzer,and the application in the production of polycrystalline silicon. The problems in the measurement were solved by improving the sampling pipeline. The improved instrument can better meet the needs of production.
出处
《低温与特气》
CAS
2016年第2期46-48,共3页
Low Temperature and Specialty Gases
关键词
DELTA-F微量氧分析仪
管线改造
DELTA-F coulomb micro oxygen analyzer
transformation of sampling pipeline
