摘要
X射线光电子能谱(XPS)是一种表面分析方法,利用这种方法可以得到样品的化学状态、元素组成等大量的重要信息,在多种材料的基础研究及实际应用中有非常重要的作用。简要介绍了XPS在材料研究中的应用,该表征技术可应用于分析样品元素组成及化学状态、测量超薄膜样品的厚度、对样品中元素进行深度剖析确定元素浓度、对样品进行成像及微区分析得到元素分布情况。
X-ray photoelectron spectroscopy（XPS）was applied particularly in surface analysis.Using XPS we can obtain information on the elemental surface chemical composition.On the basis of a variety of materials research and practical application has a very important role.This paper will discuss some application examples,generally applied in the analysis of sample composition and chemical state of element,measuring the thickness of ultrathin film samples,on the depth of elements in the sample analysis to determine the element concentration,imaging the samples to determine the elements distribution.
出处
《湖北师范大学学报（自然科学版）》
2017年第1期88-92,105,共6页
Journal of Hubei Normal University：Natural Science
关键词
XPS
表面分析
化学组成
应用
XPS
surface analysis
surface chemical composition
application
