摘要
基于最小化阿贝误差的理念,设计了带有重力补偿器的整体结构对称的Z轴测量平台,其次,使用扫面静电力显微镜组成配套的探针系统,最后,对设计的核心内容分两组进行分离测试以验证设计的合理性与有效性。测试首先验证了测量系统分别在静态和动态下重力补偿器的可行性,然后验证经过双高度法补偿后的扫描静电力显微镜探针系统的有效性,实验结果表明,设计的纳米级Z轴坐标测量系统可实现超高精度空间分辨率,具有50 mm的有效行程范围,同时具有对部分非导体的测量能力,使得微纳米测量机的适用范围得到延伸,具有较高的应用价值。
The accuracy of the Z-axis in the vertical direction of the machine determines the overall performance of the three-dimensional measurement of the micro-nano coordinate measuring machine to a large extent. In order to improve the measurement accuracy of the coordinate measuring machine,it is necessary to study the Z-axis measuring system of the coordinate measuring machine. Firstly,based on the idea of minimizing Abbe error,a Z-axis measurement platform with symmetrical structure of gravity compensator was designed. Secondly,the probe system was composed of scanning electrostatic force microscope. Finally,two separate tests were carried out to verify the rationality and effectiveness of the design. The feasibility of the measurement system with gravity compensator in the static and dynamic was verified separately by the experiment,and then the validity of the scanning electrostatic force microscope probe system compensated with the double height method was verified. The experimental results showed that the novel Z-axis coordinate measuring system had a spatial resolution of 0. 6 nm with an effective stroke range of 50 mm,and had a measurement capability for some non-conductors. The research extended the applicable range of micro-nano coordinate measuring machine and had high application value.
出处
《农业机械学报》
EI
CAS
CSCD
北大核心
2017年第11期417-422,共6页
Transactions of the Chinese Society for Agricultural Machinery
基金
国家自然科学基金项目(51405003)
安徽省教育厅自然科学基金重点项目(KJ2015A058)
关键词
微纳米测量
重力补偿器
扫描静电力显微镜探针系统
双高度法
micro-nano measurement
gravity compensator
scanning electrostatic force microscopy
double height method
