摘要
目的通过分析CVD金刚石膜与几种常用红外光学窗口材料在砂蚀过程中形貌特征以及红外透过率的变化规律,获得CVD金刚石膜在砂蚀过程中的材料去除机制及抗砂蚀性能的关键因素。方法采用喷射式冲蚀磨损系统,对CVD金刚石膜及其他几种常见红外光学材料进行砂蚀性能测试。通过扫描电子显微镜对材料冲蚀后表面形貌进行观察,电子天平测量红外材料砂蚀率。采用红外光谱仪对砂蚀前后红外光学材料进行测量,评价其冲蚀前后的红外性能变化。结果 CVD金刚石膜抗砂蚀能力远高于Ge、ZnS、MgF_2以及石英玻璃。在设定测试条件下,仅经过6 s冲蚀,除CVD金刚石膜外,其余光学材料的红外透过性能下降40%~60%。而CVD金刚石经受240 min的相同条件冲蚀,其红外透过率仅下降9.5%,显示出极佳的抗砂蚀能力。结论 CVD金刚石膜的冲蚀过程主要是微裂纹形成及扩张连接导致材料流失。其他材料的冲蚀过程既有裂纹扩展,也有反复的切削、犁削,而后者是这些材料被冲蚀的主要原因。
The work aims to key factors affecting material removal mechanism and erosion resistance of CVD diamond film during sand erosion by analyzing morphology features and sand erosion resistance of CVD diamond film and several common infrared window materials during sand erosion. Jet-type erosion wear system was used to test erosion resistance of CVD di-amond film and other common infrared optical materials. Morphology of materials after erosion was observed with SEM, sand erosion rate of infrared materials was measured with electronic balance. The infrared optical materials before and after sand ero- sion were measured with infrared spectrometer, and infrared performance variation before and after erosion was evaluated. The sand erosion resistance of CVD diamond film was much higher than that of Ge, ZnS, MgF2 and quartz glass. Only after 6 seconds of sand erosion test under set measurement conditions, infrared transmittance of Ge, ZnS, MgF2 and quartz glass de- creased by 40%-46% except for CVD diamond film. While the transmittance of CVD diamond decreased by merely 9.5% even though CVD diamond has been eroded for 240 min under the same condition, and thereby exhibiting superior sand erosion re- sistance. Main cause of CVD diamond film erosion is microcrack formation and material loss led by expanded connection. The main cause of material erosion is repeated cutting and ploughing, for other materials, crack formation as well as cutting and ploughing.
出处
《表面技术》
EI
CAS
CSCD
北大核心
2017年第6期270-275,共6页
Surface Technology
基金
国家自然科学基金项目(51272024)~~
关键词
CVD金刚石膜
红外窗口
砂蚀
冲蚀机制
CVD diamond film
infrared window
sand erosion
erosion mechanism
