期刊文献+

Effect of Axial Magnetic Field on the Microstructure, Hardness and Wear Resistance of TiN Films Deposited by Arc Ion Plating 被引量:4

Effect of Axial Magnetic Field on the Microstructure, Hardness and Wear Resistance of TiN Films Deposited by Arc Ion Plating
原文传递
导出
摘要 TiN films were deposited on stainless steel substrates by arc ion plating. The influence of an axial magnetic field was examined with regard to the microstructure, chemical elemental composition, mechanical properties and wear resistance of the films. The results showed that the magnetic field puts much effect on the preferred orientation, chemical composition, hardness and wear resistance of TiN films. The preferred orientation of the TiN films changed from(111) to(220) and finally to the coexistence of(111) and(220) texture with the increase in the applied magnetic field intensity. The concentration of N atoms in the TiN films increases with the magnetic field intensity, and the concentration of Ti atoms shows an opposite trend. At first, the hardness and elastic modulus of the TiN films increase and reach a maximum value at 5 m T and then decrease with the further increase in the magnetic field intensity. The high hardness was related to the N/Ti atomic ratio and to a well-pronounced preferred orientation of the(111) planes in the crystallites of the film parallel to the substrate surface. The wear resistance of the Ti N films was significantly improved with the application of the magnetic field, and the lowest wear rate was obtained at magnetic field intensity of 5 m T. Moreover, the wear resistance of the films was related to the hardness H and the H3/E*2 ratio in the manner that a higher H3/E*2 ratio was conducive to the enhancement of the wear resistance. TiN films were deposited on stainless steel substrates by arc ion plating. The influence of an axial magnetic field was examined with regard to the microstructure, chemical elemental composition, mechanical properties and wear resistance of the films. The results showed that the magnetic field puts much effect on the preferred orientation, chemical composition, hardness and wear resistance of TiN films. The preferred orientation of the TiN films changed from(111) to(220) and finally to the coexistence of(111) and(220) texture with the increase in the applied magnetic field intensity. The concentration of N atoms in the TiN films increases with the magnetic field intensity, and the concentration of Ti atoms shows an opposite trend. At first, the hardness and elastic modulus of the TiN films increase and reach a maximum value at 5 m T and then decrease with the further increase in the magnetic field intensity. The high hardness was related to the N/Ti atomic ratio and to a well-pronounced preferred orientation of the(111) planes in the crystallites of the film parallel to the substrate surface. The wear resistance of the Ti N films was significantly improved with the application of the magnetic field, and the lowest wear rate was obtained at magnetic field intensity of 5 m T. Moreover, the wear resistance of the films was related to the hardness H and the H3/E*2 ratio in the manner that a higher H3/E*2 ratio was conducive to the enhancement of the wear resistance.
出处 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2015年第8期984-993,共10页 金属学报(英文版)
基金 financially supported by the National Natural Science Foundation of China (No. 51171197)
关键词 Magnetic field Arc ion plating TiN films Hardness Wear resistance Magnetic field Arc ion plating TiN films Hardness Wear resistance
  • 相关文献

参考文献55

  • 1P. Sathrum, B.F. Coll, Surf. Coat. Technol. 50, 103 (1992). 被引量:1
  • 2Y.H. Zhao, G.Q. Lin, C. Dong, L.S. Wen, J. Mater. Sci. Technol. 21, 423 (2005). 被引量:1
  • 3W.C. Lang, J.Q. Xiao, J. Gong, C. Sun, R.F. Huang, L.S. Wen, Vacuum 84, 1111 (2010). 被引量:1
  • 4Y.H. Zhao, X.Q. Wang, J.Q. Xiao, B.H. Yu, F.Q. Li, Appl. Surf. Sci. 258, 370 (2011). 被引量:1
  • 5Y.H. Zhao, G.Q. Lin, J.Q. Xiao, W.C. Lang, C. Dong, J. Gong, C. Sun, Appl. Surf. Sci. 257, 5694 (2011). 被引量:1
  • 6I.I. Aksenov, V.G. Padalka, V.T. Tolok, V.M. Khoroshikh, Sov. J. Plasma Phys. 6, 505 (1980). 被引量:1
  • 7D.M. Sanders, E.A. Pyle, J. Vac. Sci. Technol. A 5, 2728 (1987). 被引量:1
  • 8P.J. Martin, A. Bendavid, Thin Solid Films 394, 1 (2001). 被引量:1
  • 9M.M.M. Bilek, Y. Yin, D.R. McKenzie, W.I. Milne, Ion trans- port mechanisms in a filtered cathodic vacuum arc (FCVA) system, in Proceedings ISDEIV: XVllth International Sympo- sium on Discharges and Electrical Insulation in Vacuum, Berkeley, CA, vol. 2 (IEEE, New York, 1996), pp. 962-966, July 21-26 1996. 被引量:1
  • 10M.B. Taylor, J.G. Partridge, D.G. McCulloch, M.M.M. Bilek, D.R. McKenzie, Thin Solid Films 519, 3573 (2011). 被引量:1

同被引文献25

引证文献4

二级引证文献13

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部