摘要
针对TiAlN薄膜耐磨性不够优异的问题,研究了Al质量分数对Ti_(1-x)Al_(x)N薄膜结构和摩擦学性能的影响。采用磁控溅射沉积技术制备了4种不同Al质量分数的Ti_(1-x)Al_(x)N薄膜。利用扫描电镜(SEM)、能谱仪(EDS)及X射线衍射仪(XRD),对薄膜的微观形貌、元素成分与晶体结构进行了表征。采用纳米压痕仪测试薄膜的硬度和弹性模量,用摩擦磨损试验机和白光干涉三维形貌仪测试薄膜的摩擦磨损性能。研究结果表明:随着Al质量分数在一定范围内的增加,薄膜从沿c-TiN(111)晶面生长逐渐转向h-AlN(200)晶面择优取向,Ti_(1-x)Al_(x)N薄膜疏松结构得到了改善,柱状结晶发生细化,表面形貌更加致密。同时,Ti_(1-x)Al_(x)N薄膜的硬度和弹性模量得到提高,磨损机理由严重的磨粒磨损、黏着磨损转变为轻微的磨粒磨损,平均体积磨损率降低。Ti_(0.67)Al_(0.33)N薄膜的综合性能最优,硬度和弹性模量分别为14.059 GPa和203.37 GPa,摩擦因数最低为0.182,平均体积磨损率为1.321×10^(-8)mm^(3)/(N·m),呈现出较好的摩擦学性能。
Aiming at the problem of insufficient wear resistance of TiAlN films,the effect of Al mass fraction on the structure and tribological properties of the Ti_(1-x)Al_(x)N films was studied.Four different Al mass fractions of Ti_(1-x)Al_(x)N films were deposited by magnetron sputtering technology.Scanning electron microscopy(SEM),energy dispersive spectrometer(EDS)and X-ray diffraction(XRD)were used to characterize the microstructure,composition and crystal structure of the films.Nanoindenter was used to test the hardness and elastic modulus of the films.The friction and wear properties of the films were investigated by friction and wear tester and white light interferometer 3D profilometer.The results show that with the increase of Al mass fraction within a certain range,the film gradually shifts from growing along the c-TiN(111)crystal plane to the preferred orientation of the h-AlN(200)crystal plane,the loose structure of the Ti_(1-x)Al_(x)N film is improved,the columnar crystal is refined,and the surface morphology is more compact.Simultaneously,the hardness and elastic modulus of the Ti_(1-x)Al_(x)N film are improved.The wear mechanism is changed from obvious adhesive wear and abrasive wear to slight abrasive wear,and the average volume wear rate is reduced.The Ti_(0.67) Al_(0.33) N film has the best overall performance.The hardness and elastic moduli are 14.059 GPa and 203.37 GPa respectively.The friction coefficient is the lowest 0.182,and the average volume wear rate is 1.321×10^(-8)mm^(3)/(N·m),which shows a better tribological property.
作者
张世玺
蔡海潮
薛玉君
畅为航
田昌龄
ZHANG Shixi;CAI Haichao;XUE Yujun;CHANG Weihang;TIAN Changling(Mechatronics Engineering School,Henan University of Science&Technology,Luoyang 471003,China;Henan Key Laboratory for Machinery Design&Transmisson System,Henan University of Science&Technology,Luoyang 471003,China)
出处
《河南科技大学学报（自然科学版）》
CAS
北大核心
2021年第4期1-6,M0002,共7页
Journal of Henan University of Science And Technology:Natural Science
基金
国家国防基础科研计划基金项目(JCKY2018419C101)
河南省科技攻关项目(202102210073)。
