摘要
采用电弧离子镀方法制备了不同厚度TiN薄膜,并对其硬度、结合力、残余应力、摩擦磨损特性等力学性能进行了系统性研究,以揭示硬质薄膜厚度对其力学性能的影响规律。结果表明,随着厚度增加,薄膜表面大颗粒增加,膜基界面剪切力增大,薄膜硬度逐渐增加,结合力逐渐下降,摩擦系数略有下降;而薄膜应力沿层深分布趋势基本一致,都呈钟罩形分布;磨损率随薄膜厚度变化不大,即薄膜越厚越耐磨。
The surface of 316 L stainless steel was modified with the TiN coatings deposited by arc ion plating.The effect of the coating conditions,including but not limited to the N2 pressure,substrate temperature,film thickness,deposition time and bias voltage,on the microstructures and mechanical properties was investigated with scanning electron microscopy,energy dispersive spectroscopy and conventional mechanical probes. The results show that the thickness of TiN coating has a major impact on the mechanical behavior of the surface and interface. To be specific,as the thickness increased,the grain-size,surface hardness,interfacial shear-stress and wear-resistance increased,accompanied by decreases of the friction coefficient and interfacial adhesion. In addition,the average stress vertically changed in a slow increase-decrease manner.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2016年第3期291-295,共5页
Chinese Journal of Vacuum Science and Technology
基金
国家自然科学基金项目(No.51401128)
深圳市科技计划项目(No.JCYJ20140508155916426)
中山市科技计划与创新团队项目
关键词
硬质薄膜
力学性能
薄膜厚度
TIN
残余应力
Hard Films
Mechanical properties
Thickness of Film
TiN
Residual Stress
