摘要
综述了TiO2氧敏传感器的发展概况、氧敏机理,并对以不同方法制备的TiO2氧敏器件性能进行了比较,分析了如何提高氧传感器的性能,并对TiO2氧敏传感器今后的发展和研究提出了几点建议。
This paper brieflydescribes the development of TiO2 gas sensors and its oxygen -sensing mechanism. The different characteristics of oxygen sensors based on different TiO2 thin film preparing methods and how to improve them are discussed. Some suggestions for the further research and development of TiO2 oxygen sensors are proposed.
出处
《传感器世界》
2002年第7期7-10,共4页
Sensor World
