摘要
以正钛酸丁酯、无水乙醇和冰醋酸为原料，采用Ｓｏｌ－ｇｅｌ工艺匀胶技术在石英玻璃和单晶硅衬底上成功地制备了ＴｉＯ＿２薄膜，薄膜表面均匀、致密，无裂纹。研究表明，随热处理温度的提高，薄膜经锐钛矿转变为金红石结构，其转变温度因衬底不同而异，但比凝度粉末的转变温度高。金红石结构的ＴｉＯ＿２薄膜具有一定的择优取向性，其品位大小为０．０５～０．１５μｍ．
TiO_2 thin films were successfullyfabricated on quariz glass and single crystal siliconsubstrates by sol-gel process,using Ti (OC_4H_9)_4,C_2H_5OH and HAc as raw materials.The surfaces ofthe thin films were holnogeneous,dense, and crack-free.Results showed that the as-deposited filmstransformed to rutile via anatase with increasingtemperature,and the transformation temperaturedepended on the substrates.The temperature wasgenerally higher on the substrates than that in gelpowder.Oriented rutile films were obtained and theaverage grain size was 0.05～0.15μm.
出处
《功能材料》
EI
CAS
CSCD
1995年第6期528-531,共4页
Journal of Functional Materials
基金
湖北大学青年科研基金
