摘要
用溶胶—凝胶法和液相共沉淀法分别制备了ＴｉＯ＿２厚膜氧敏元件，对所得元件的性能进行了分析。通过对比实验发现，溶胶—凝胶法是一种很有潜力的制备ＴｉＯ＿２氧敏元件的新方法。
The thick film oxygen sensors based on titania ,manufactured by using the Sol-Gelmethod and the liquid phase codeposition method respectively are tested. It has been foundfrom experiments that the Sol-Gel method is a new excellent potential method to manufacturethick film oxygen sensors based on titania.
出处
《西安电子科技大学学报》
EI
CAS
CSCD
北大核心
1994年第1期117-120,共4页
Journal of Xidian University
关键词
溶胶-凝胶法
制备
敏感元件
传感器
Sol-Gel method
liquid phase codeposition method
thick film oxygen sensors based on titania
