摘要
以钛酸丁酯为原料，无水乙醇为溶剂，添加适量稳定剂制成稳定溶胶，用浸涂法在 Ａｌ２Ｏ３基片上制备 ＴｉＯ２薄膜，经 １０００ ℃ Ｈ２下还原制得 ＴｉＯ２－ｘ薄膜，在钼酸铵溶胶中浸泡一定时间得到掺钼薄膜实验结果表明掺钼薄膜元件在 ８００ ℃下的氧敏感性和重复性比未掺杂时提高，
The TiO2 films on A12O3 substrates have been prepared by dip-coating method. The tetrabutyl titanate and absolute ethanol were used as raw material and solvent respectively. Some stabilizing agents were added in the solution to obtain stable sols. The TiO2-x. films were gained by reducing TIO2-x films in H2 atmosphere at 1000 . The Mo-doped TiO2-x. films were made of immersing the TiO2-. films in ammonlum molybdate sol for some hours. The experiment results showed that Mo-doped TiO2-x films had better oxygen sensitivity and reproducibility of oxidizingreducing atmosphere than pure TiO2-. films at 800 , and they had excelfent resistance-temperature stability in N2 atmosphere. The roles of Mo in the film were also investigated by using XPS analysis.
出处
《材料研究学报》
EI
CAS
CSCD
北大核心
2000年第B01期189-193,共5页
Chinese Journal of Materials Research
基金
八六三计划新材料领域
天津自然科学基金
Toycia Co.资助项目
