摘要
微纳机电系统(MEMS/NEMS)将处理热、光、磁、化学、生物等结构和器件通过微电子工艺及其他一些微加工工艺制作到芯片上,并通过与电路以及相互之间的集成来构筑复杂的微型系统.由于微纳机电系统具有高度的交叉性与渗透性,而使其研究和发展呈现出多样性.本文立足于微纳机电系统与集成电路的交叉,侧重讨论微纳机电系统与CMOS集成电路的集成、微纳机电系统技术与纳米技术的融合,以及与现代生物技术的交叉,就一些典型的器件与工艺,介绍一些前沿发展和趋势.
The micro-nanoelectromechanical systems（MEMS/NEMS,herein called MEMS for simplicity）,which the originate from microelectronics technology,can deal with the thermal,optical,magnetic,chemical,and biological variables.Various structures and devices can be fabricated on a chip through the integration technology.In the last few decades,MEMS has played increasingly important roles in aerospace,military,optical communication,wireless communication,biomedicine,etc.,and MEMS products have been widely used in our daily lives.Due to the highly multidisciplinary nature,MEMS shows a diverse research and development trend.This report will discuss the status and trend of the development of MEMS fundamental research.The discussion will focus on the fusion of MEMS technology with integrated circuits,nanotechnology,and modern biotechnology.The strong intervention of the TSMC,the largest IC foundry in the world,in MEMS foundry industry greatly accelerates the pace of integration of MEMS and IC.More and more new nano-materials and nanofabrication technologies have been applied in MEMS technology to promote the performance and the emergence of new devices.On the other hand,NEMS technology provides new nanoscale three-dimensional processing approaches for novel CMOS devices,and spawns new types of IC devices,such as NEMS relays and nano-mechanical memories.The combination with the biotechnology becomes a new growth point of MEMS,where the flexible electrode and circuit is one of the typical representatives.
出处
《中国科学：信息科学》
CSCD
2012年第12期1599-1615,共17页
Scientia Sinica(Informationis)
基金
国家重点基础研究发展计划(973计划)(批准号:2011CB707505)资助项目
