摘要
研究了基于硅压阻效应纳米梁非线性振动控制方法。在纳米梁固定端上表面粘贴硅压阻膜片,压阻膜片的电阻值随着纳米梁的振动发生变化。利用惠斯通电桥电路提取振动信号作为电压反馈控制信号,控制纳米梁的非线性振动。用多尺度法求解方程,得到系统主共振的幅频响应方程。由幅频响应方程分析系统非线性振动方程解的稳定性,研究了交流激励电压幅值、阻尼、反馈增益参数对系统稳定性和振幅的影响规律。研究结果表明:激励电压由0.25 V减小至0.1 V时,最大振幅衰减60%。无量纲阻尼由0.0585增加至0.0878时,最大振幅衰减40%。增大阻尼和反馈增益参数可以减弱甚至消除纳米梁振动的非线性特性。该研究成果为纳米梁非线性振动控制及信号提取提供了一种理论方法。
The nonlinear vibration control method of nanobeam was studied based on silicon piezoresistive effect.A silicon piezoresistive film is adhered onto the upper surface of the fixed end of the nanobeam.The resistance of the pressure film changed with the vibration of nanobeam.Using Wheatstone Bridge circuit to extract vibration signal as the voltage feedback control signal with which nonlinear vibration of nanobeam was controlled.The multi-scale method was used to solve the equation,and the amplitude frequency response equation of the main resonance of the system was obtained.According to the amplitude-frequency response equation,the stability of the solution of the nonlinear vibration equation of the system was analyzed and the influence of the amplitude,damping and feedback gain parameters of the AC excitation voltage on the stability and amplitude of the system was studied.The results show that when the excitation voltage decreased from 0.25 V to 0.1 V,the maximum amplitude is attenuated by 60%.When the dimensionless damping increased from 0.0585 to 0.0878,the maximum amplitude attenuated by 40%.It can be seen that increasing the damping and feedback gain parameters could weaken or even eliminate the nonlinear characteristics of nanobeam vibration.The research results may provide a theoretical method for nonlinear vibration control and signal extraction of nanobeam.
作者
孔维旭
刘灿昌
万磊
党壮
贺成泰
KONG Wei-xu;LIU Can-chang;WAN Lei;DANG Zhuang;HE Cheng-tai(School of Transportation and Vehicle Engineering,Shandong University of Technology,Zibo 255049,China)
出处
《科学技术与工程》
北大核心
2020年第4期1319-1325,共7页
Science Technology and Engineering
基金
国家自然科学基金(51575325)
山东省自然科学基金(ZR2017LA004)。
关键词
非线性振动控制
硅压阻膜片
主共振分析
多尺度法
nonlinear vibration control
silicon piezoresistive diaphragm
primary resonance analysis
multiscale method
