摘要
利用超声喷雾热解方法,以不同的沉积温度(450～510℃)在石英衬底上制备出具备较高光学质量的氮掺氧化锌(ZnO:N)薄膜。通过X射线衍射(XRD)谱研究了薄膜的结构,用扫描电子显微镜(SEM)研究了薄膜的表面形貌,用紫外可见(UV)分光光度计、光致发光(PL)谱对薄膜的光学特性进行了测试分析。结果表明,所制备薄膜在可见波段具有较高透过率,并且沉积温度对ZnO:N薄膜的透过性能有很大影响。在衬底温度为500℃时得到的ZnO:N薄膜为六角纤锌矿结构,结晶质量最好、光透过率最高。PL谱的测试结果显示,在该条件制备的ZnO:N薄膜只在389.4nm处有一个较强的近带边紫外发光峰。
ZnO：N thin films with better optical properties were successfully prepared on quartz substrate by ultrasonic spray pyrolysis method at different substrate temperatures （450-5i0 ℃ ）. Structural, mor- phological and optical properties of ZnO： N thin films were investigated by X-ray diffraction （XRD）, scanning electron microscopy （SEM）, UV-VIS spectrophotometer and photoluminescence （PL）. Experi- mental results show that all the deposited films have good transmittance, and the substrate temperature has important effect on them. The ZnO：N thin films deposited at 500℃ are hexagonal wurtzite struc- ture with better crystalline quality and higher transmittance. Only the high-intensity near-hand edge ul- traviolet emission peak （389.4 nm） is observed in room-temperature photoluminescence spectra for this sample.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2012年第11期2132-2136,共5页
Journal of Optoelectronics·Laser
基金
国家自然科学基金(11004092)
大连市科学技术基金(2011J21DW013)资助项目
