摘要
为满足现代基础材料硅片加工的要求,针对多线切割机走线系统的特点,提出一种全自动机线张力控制方法。应用该方法对切割线进行恒张力控制,并对全自动机线张力控制系统进行了仿真。仿真结果表明:该方法能够满足大直径、超薄硅片的加工要求。
To meet the requirements of silicon wafer for multi-wire saw, a fully automatic machine thread tension control method was presented according to the features of alignment system of multi-wire saw. This method was applied to ensure cutting line constant tension. Then automatic machine thread tension control system was simulated. Simulation results show that this method can meet the processing requirements of the large-diameter and ultra-thin silicon wafer.
出处
《机床与液压》
北大核心
2012年第10期8-11,共4页
Machine Tool & Hydraulics
基金
北京市教育委员会科技发展计划项目(KM2011232004)
关键词
多线切割
机线张力控制
仿真
Multi-wire saw
Machine thread tension control
Simulation
