摘要
常用的钼基片镀钌前预处理工艺包括碱洗除油、阳极浸蚀、酸洗、活化、预镀冲击镍。讨论了预处理工艺中碱洗工艺方案、阳极浸蚀的电流密度和时间,以及预镀冲击镍的电流波形对钌镀层结合力的影响。在65°C的50 g/L氢氧化钠溶液中以阳极电流密度16 A/dm2处理2 min,在体积分数为200 mL/L的硫酸溶液中以阳极电流密度0.05-0.10 A/dm2浸蚀30-45 s,采用占空比60%、频率1 kHz、平均电流密度10 A/dm2的脉冲电流在20-30°C的240 g/L氯化镍＋100 g/L盐酸溶液中预镀镍,可保证钌镀层结合力良好。
The pretreatment for electroplating of ruthenium on molybdenum substrate generally includes alkaline degreasing,anodic etching,acid pickling,activation,and nickel strike pre-plating.The effects of alkaline degreasing scheme,current density and time for anodic etching,as well as current waveform in nickel strike pre-plating on the adhesion of ruthenium coating were discussed.Well-adhered ruthenium coatings can be obtained after pretreatment by following processes： electrolytic degreasing in a 50 g/L NaOH solution at 65 °C and anodic current density of 16 A/dm2 for 1 min;etching with 200 mL/L H2SO4 solution at an anodic current density of 0.05-0.10 A/dm2 for 30-45 s;and pulsed nickel pre-plating in a bath containing nickel chloride 240 g/L and hydrochloric acid 100 g/L at temperature 20-30 °C,average current density 10 A/dm2,duty cycle 0.6,and frequency 1 kHz.
出处
《电镀与涂饰》
CAS
CSCD
北大核心
2011年第7期13-15,共3页
Electroplating & Finishing
关键词
钼基片
镀钌
预处理
冲击镀镍
结合力
molybdenum substrate
ruthenium plating
pretreatment
strike nickel plating
adhesion strength
