摘要
针对钼圆片镀钌挂具不合理设计所产生的挂点、对电流产生遮挡以及边缘效应明显等问题,采用辅助阴极的方法加以改进,从而改善了镀层的均匀性,并通过一具多挂提高了生产效率。
Aiming at some problems such as contact point, current block and edge effect caused by unreasonable design of jig in ruthenium electroplating of molybdenum disc, auxiliary cathodes were used to improve the uniformity of ruthenium coating. The production efficiency was improved by hanging several molybdenum discs on one jig.
出处
《电镀与涂饰》
CAS
CSCD
北大核心
2017年第8期419-421,共3页
Electroplating & Finishing
关键词
钼圆片
镀钌
挂具
设计
镀层均匀性
molybdenum disc
ruthenium electroplating
jig
design
coating uniformity
