摘要
阐述了钼圆产品的性质、应用情况,并介绍了钼圆的主要生产方法及其进展。钼圆具有导电、导热性好,强度高,线膨胀系数小,加工性良好等特点,是硅整流成套设备、半导体硅器件等生产不可缺少的基片材料。目前,钼圆生产厂家大多采用钼板冲制成圆方式。钼圆片的质量要求较高,表面应无各种缺陷,同时要求平直度、平行度好,粗糙度要低。近年来,钼圆的厚度普遍向薄发展,中间带孔钼圆、带槽钼圆也应运而生。
This paper expounds property and application of Molybdenum disk, and introduces mostly producing method and development of Molybdenum disk. With good electrical and thermal conductivity, high strength, small linear expansibility, good processing characteristics, etc, Molybdenum disk is an indispensable substrate material used in the production of silicon rectifying equipment and semiconductor silicon devices. At present, most Molybdenum disk manufacturers use molybdenum plate to punch into disc. High quality is required for Molybdenum disk, without any defects on the surface, and at the same time with good flatness and parallelism, lower roughness. In recent years, the thickness of Molybdenum disk has been made thinner and thinner, and also Molybdenum disk with middle hole and groove came with the tide of fashion.
出处
《金属世界》
2009年第6期98-99,共2页
Metal World
关键词
铝圆
应用
进展
Molybdenum
application
development
