摘要
贵金属钌在现代工业中具有广泛的应用。本文首先介绍了钌块体的制备方法,对钌块体的塑性、机加工性能及其影响因素进行了分析,介绍了X衍射测定钌块体内应力的方法;其次,综述了钌薄膜的制备方法,介绍了钌薄膜在集成电路中作为铜的粘结层/扩散阻挡层、磁记录媒介中作为中间层/籽晶层、抗氧化保护层材料及电接触材料等方面的应用;最后,总结了目前钌研究的不足之处,并对其未来发展进行了展望。
Ruthenium(Ru),precious metal,is widely used in modern industry.In present paper,the preparation methods of Ru bulk materials are introduced firstly.Moreover,the plasticity,machinability,and influence factors are analyzed.The X-ray diffraction used to measure the internal stress is presented.Secondly,the preparation methods of Ru thin films are reviewed.We also present the application of Ru films such as the bonding layer/diffusion barrier layer for copper in integrated circuits,the intermediate layer/seed layer in magnetic recording media,anti-oxidation protective layer materials and electrical contact materials,etc.In the end,the present research shortcomings of Ru are summarized and a vision of its future research trends is made.
作者
张仁耀
郭俊梅
闻明
管伟明
ZHANG Renyao;GUO Junmei;WEN Ming;GUAN Weiming(State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals,Kunming Institute of Precious Metals,Kunming 650106,China)
出处
《材料导报》
EI
CAS
CSCD
北大核心
2021年第21期21243-21248,共6页
Materials Reports
基金
国家重点研发计划项目(2017YFB0305503)
云南省国际合作计划项目(2014IA037)
云南省院所专项项目(2009CF003)
云南省创新团队项目(2019HC024)。
关键词
钌
制备方法
钌薄膜
工业应用
ruthenium
preparation method
ruthenium thin films
industrial application