摘要
介绍了石英振梁加速度计微细加工工艺。对其中的重点、难点进行研究分析。对石英晶片上Cr-Au掩蔽薄膜的沉积工艺,从理论上分析了影响薄膜抗蚀性因素,提出了解决办法。在湿法腐蚀过程中,强调了精确控制腐蚀深度和截面形貌的重要性。并对其带来的影响进行了分析。
This paper introduces a micromachining manufacturing process of quartz vibrating beam accelerometer. This work focuses on thin metal film depositing and wet etching processes. Some possible reasons that affect the performance of the thin metal film are analyzed by theory and the solutions are proposed. The accuracy of depth and profile of the beam are proved to be important for the wet etching by simulation.
出处
《仪表技术与传感器》
CSCD
北大核心
2009年第B11期199-201,290,共4页
Instrument Technique and Sensor
关键词
振梁加速度计
薄膜沉积
湿法腐蚀
vibrating beam accelerometers （VBA）
thin film deposing
wet etching
