摘要
随着石英谐振器向小型化、高频化发展,其尺寸越来越小,因此,低成本的谐振器精准制造工艺尤为重要。该文对石英晶片进行腐蚀实验以确定精准制造矩形谐振器的最佳工艺条件,研究了温度对金属保护层完整性的影响,以及腐蚀时间对石英表面粗糙度的影响。腐蚀速率稳定且适中,有利于谐振器的精准制造。设计了石英谐振器工艺流程,得到质量较好的超薄矩形AT切高频石英谐振器。分析其尺寸误差产生的原因,并总结了一套精度较好的湿法腐蚀工艺,有望采用低成本手段使矩形谐振器的厚度小于10μm。
Miniaturization and high-frequency quartz resonators are being developed,with increasingly smaller sizes.Therefore,it is very important to develop a low-cost precision manufacturing process for quartz resonators.Etching experiments on quartz wafers were conducted to determine the optimal process conditions for precise manufacturing of rectangular resonators.The effects of temperature on the integrity of the metal protective layer and of etching time on the surface roughness of quartz were studied.The corrosion rate was stable and moderate,which was conducive to the precise manufacturing of the resonator.The process flow of the quartz resonator was designed to obtain an ultra-thin rectangular AT-cut high-frequency quartz resonator with good quality.The causes of the error were analyzed,and a set of wet etching process with good precision was summarized.It is expected that the thickness of the rectangular resonator will be reduced to 10μm or less using low-cost means.
作者
龙雪松
LONG Xuesong(School of Electronic Engineering,Beijing University of Posts and Telecommunications,Beijing 100080,China)
出处
《压电与声光》
CAS
北大核心
2024年第3期328-332,共5页
Piezoelectrics & Acoustooptics
关键词
AT切石英
湿法腐蚀
制作工艺
AT-cut quartz
wet etching
manufacturing process
