摘要
石英单晶具有复杂的晶向,侧壁腐蚀形貌不规则。以制作规则的微惯性传感器关键结构单元—石英悬臂梁-质量块结构为研究目标,研究Z切石英单晶在氟化氢铵溶液中的侧壁腐蚀形貌演化规律具有重要意义。首先研究了侧向所露晶面的倾斜角度和腐蚀速率随方向角的变化,在此基础上研究了侧面晶棱随时间的演化规律。研究结果表明:侧向所露晶面的倾斜角度和腐蚀速率随方向角发生变化,在方向角50°~90°范围,双向腐蚀是侧向只出现一级晶棱,其它方向出现二级晶棱;侧面晶棱可通过长时间的腐蚀修平,修平时间随方向角发生变化。以石英悬臂梁-质量块结构为例,通过腐蚀7.5 h,获得了侧壁平整的石英悬臂梁-质量块结构,证明了该方法的适用性。该方法有助于在设计石英结构时能够考虑侧壁形貌对结构性能的影响,或利用侧壁形貌特点对结构进行设计。
Single-crystal quartz has complex crystal orientation, and the profile of the etched sidewall is irregular. In order to obtain symmetric spring-mass, which is the key structure of micromechanical inertial sensors, the evolvement of sidewall profiles in Z-cut quartz wet etching process is studied. Firstly, the sidewall planar facet angles and the etching rate corresponding to orientations are studied. Then, the evolvement laws of sidewall profiles corresponding to etching time are investigated. The results indicate that the sidewall planar facet angles and the etching rates change with orientation angles： the sidewall appears only one arris between 500-90-, the sidewall appears two arrises in other orientations. The sidewall arrises can be flattened by prolonging etching time, and the flattened-etching time changes with orientation angles. Taking the spring-mass structure as the example, the sidewall arrises can be flattened through 7.5 h etching, and then a regular structure is obtained. This study will benefit the design and the manufacture nfauartz de-vit-
作者
张照云
苏伟
唐彬
熊壮
许蔚
ZHANG Zhaoyun;SU Wei;TANG Bin;XIONG Zhuang;XU Wei(Institute of Electronic Engineering,China Academy of Engineering Physics,Mianyang 621999,China)
出处
《中国惯性技术学报》
EI
CSCD
北大核心
2018年第3期405-410,共6页
Journal of Chinese Inertial Technology
基金
中国工程物理研究院超精密实验室自主面上基金(ZZ16003)
关键词
微惯性传感器
湿法腐蚀
石英
腐蚀形貌
micromechanical inertial sensors
wet etching
quartz
sidewall profiles
