摘要
介绍了两种激光外差干涉信号的处理方法锁相频率解调法及组合频率解调法。此方法适用于需要实时反馈控制以及定位曝光等场合。用此方法，可以使干涉仪的测量分辨力分别达到３ｎｍ和０．５ｎｍ，干涉仪测量棱镜的允许运动速度达到３ｍｍ／ｓ。
Two kinds of signal processing methods for heterodyne interferometer, phase locked frequency demodulation and combinatorial frequency demodulation are presented in this paper. These methods are useful for real time feed back control and position exposures. Using these methods to process heterodyne signal not only make the measuring resolution up to 3nm and 0.5nm, but also enable the measuring retroreflector of interferometer to move at a velocity of 3 mm/s. \ \
出处
《宇航计测技术》
CSCD
1998年第4期7-12,共6页
Journal of Astronautic Metrology and Measurement
基金
博士后基金
清华大学精密计量与测试国家重点实验室开放基金
教委博士点基金
关键词
激光
外差干涉信号
解调
信号处理
Laser\ Heterodyne interference signal\ Frequency\ Demodulation technigue
