摘要
介绍了一种新的外差干涉信号处理方法──相位及相位整数测量法。用此方法不仅可使干涉测量的分辨率提高到λ／１０００～λ／２０００，而且扩大了测量范围，解决了大范围、动态测量位移的问题。文中还给出了用此方法进行信号处理的外差干涉仪测量压电陶瓷动态位移的实验结果。
A new signal processing method for heterodyne interferometer, phase and integer periodic phase measurement, is described. Using this method to process heterodyne signal not only makes the measuring resolution up to λ/1000～λ/2000, but also enlarges the measuring range of the interferometer, with solving the problem of large range and dynamically measuring a displacement. Experiment results are shown with a heterodyne interferometer by using this method to measure the dynamic displacement of a PZT.
出处
《计量学报》
CSCD
1995年第1期31-36,共6页
Acta Metrologica Sinica
关键词
外差干涉仪
相位测量
整数相位测量
激光干涉仪
Heterodyne interferometer
Phase measurement
Integer periodic phase measurement
