摘要
针对衍射光栅刻划机开环控制的定位精度不能满足指标要求的问题,在刻划机已有的状态和结构下,设计了微定位系统的控制器。首先,介绍了衍射光栅刻划机,分析了微定位系统及其定位精度指标。然后,运用系统辨识的方法,设计了微定位系统的扫频实验,建立其数学模型。接着,提出了在已有数学模型的基础上,运用实际测量数据和MATLAB/Simulink软件仿真试凑来设计控制器的方法,并设计了满足精度指标要求的控制器。最后,将设计的控制器应用于微定位系统并进行模拟刻划实验,实验结果可知:所设计的微定位系统控制器定位精度基本满足指标要求,其中峰-峰值小于40 nm,RSM值总体略大于2.8 nm。
Aiming at the problem that the open-loop control positioning accuracy of diffraction grating ruling engine does not meet the requirement of the specification,the controller of the micro-positioning system was designed under the existing state and structure conditions of the diffraction grating ruling engine.Firstly,the diffraction grating ruling engine is introduced,the micro-positioning system of the diffraction grating ruling engine and its positioning accuracy specification are analyzed.Then,using the system identification method,the frequency sweep experiment of the micro-positioning system is designed,and its mathematical model is established.And then,on the basis of the existing mathematical model,a design method is proposed,which uses the actual measurement data and MATLAB / Simulink software to design the controller with simulation and trial.Using this method,the controller that meets the requirements of the specification was designed.Finally,the designed controller was applied in the micro-positioning system and the simulation ruling experiments were conducted.The experiment results show that the designed controller basically meets the positioning accuracy specification requirement of the micro-positioning system;the peak-peak error is less than 40 nm,and the RSM error is slightly larger than 2.8 nm in total.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2015年第2期473-480,共8页
Chinese Journal of Scientific Instrument
基金
国家重大科研装备研制项目(ZBY2008-1)
国家重点基础研究发展计划项目(2014CB049500)
吉林省科技发展计划项目(20140203011GX)
长春市科技计划项目(Y3B43HU140)资助
关键词
微定位系统
控制器设计
数学模型
定位精度
micro-positioning system
controller design
mathematical model
positioning accuracy
