期刊文献+

微纳制造装备中拱形桥架的结构优化设计 被引量:4

Optimization Design of A Bridge Structure for Micro-nano Manufacturing Equipment
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摘要 为了提高微纳制造装备的定位精度,从提高桥架结构的刚度出发,以ANSYS软件为开发工具,提出了一种新型的拱形桥架结构。文中先从概念设计出发,设计出桥架机构的基本结构,然后利用ANSYS软件分析桥架的结构参数(如桥架厚度、立柱宽度、圆弧半径、斜面宽度和斜面高度)对刚度的影响,最终确定优化后的桥架模型。利用ANSYS软件对桥架结构进行静力分析和模态分析,通过对比不同设计方案的仿真结果,表明了新型桥架结构的优越性。 In order to improve the positioning precision of micro-nano manufacturing equipment, this paper presents a new type of arch bridge structure through the optimization design with ANSYS software. By conceptual design, a basic struture in embryonic form is firstly provided. ANSYS software is then adoped to analyze the relationship between the structural stiffness and the structural parameters ( i. e. thickness and width of bridge, radius of circular arc, width and height of inclination). For validation of the final bridge model, static analysis and modal analysis are carried out with ANSYS. By the comparison with different schemes, the proposed bridge model has better stiffness and little deformation.
出处 《机械设计与研究》 CSCD 北大核心 2012年第1期33-36,共4页 Machine Design And Research
基金 国家自然科学基金资助项目(91023047) 上海市教委曙光计划资助项目(10SG17)
关键词 桥架结构 优化设计 模态分析 有限元 bridge structure optimization design modal analysis finite elements
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参考文献13

  • 1齐永岳,赵美蓉,林玉池.纳米测量系统的研究现状与展望[J].仪器仪表学报,2003,24(z1):91-94. 被引量:16
  • 2Uwe Brand, Juergen Kirchhoff. A micro-CMM with metrology frame for low uncertainty measurements [J]. Measurement Science and Technology, 2005, 16 ( 12 ) :2489 - 2497. 被引量:1
  • 3Takamasu K, Furutani R, Ozune S. Development of Nano-CMM (Coordinate Measuring Machine with Nanometer Resolution ) Proceeding of XIV IMEKO World Congress[ C]//Finland, 1997 : 34 - 39. H. 被引量:1
  • 4H Haitjema W O, Pril P H J. Schellekens. Development of a silicon-based nanoprobe system for 3-D measurements [ J]. Annals of CIRP, 2001,50(1): 365 -368. 被引量:1
  • 5John A Kramar. Nanometre resolution metrology with the Molecular Measuring Machine [ J ]. Measurement Science and Technology, 2005, 16:2121 -2128. 被引量:1
  • 6Kim S W. New Design of Precision CMM based upon Volumetric Phase-Measuring Interferometry [ J ]. Annals of C1RP, 2001 , 51(1) : 357-360. 被引量:1
  • 7Fan K C, Wang W L, Chen F. Innovative design of a new CMM bridge [J]. Chin J Mech Eng, 2004, 17(2) :170 -173. 被引量:1
  • 8杨国哲,王立平,郁鼎文,黄欢.三坐标精密运动平台底座的设计[J].机械工程师,2005(7):21-22. 被引量:6
  • 9范光照,朱志良,钟添东.小型微/纳米级三坐标测量机的研制[J].纳米技术与精密工程,2003,1(1):17-23. 被引量:19
  • 10Ozturk O. Multi-Scale Alignment and Positioning System II [ D ]. United States North Carolina: The University of North Carolina at Charlotte, 2008. 被引量:1

二级参考文献46

  • 1范光照,朱志良,钟添东.小型微/纳米级三坐标测量机的研制[J].纳米技术与精密工程,2003,1(1):17-23. 被引量:19
  • 2[1]Kramar J. Molecular measuring machine research and development[Z]. http://www.mel.nist.gov/div821/webdocs-14/m3.pdf, 2003. 被引量:1
  • 3[2]NPL. Measurement of miniature components and features[Z].http://www.npl.co.uk/length/dmet/science/small-cmm.html, 2003. 被引量:1
  • 4[3]Schwenke H. Future challenges in co-ordinate metrology: Addressing metrological problems for very small and very large parts[A]. Proc of the IDW2001[C]. Knoxville: 2001. 被引量:1
  • 5[4]Takamasu K. Development of nano-CMM and parallel CMM-CMM in the 21th century[A]. Proc of the International Dimensional Metrology Workshop[C]. Tennessee, USA: 1999. 被引量:1
  • 6[5]Hocken R J, Trumper D L , Wang C. Dynamics and control of the UNCC/MIT sub-atomic measuring machine[J]. Annals of the CIRP, 2001,50(1):373-376. 被引量:1
  • 7[6]Haitjema H. Development of a silicon-based nanoprobe system for 3-D measurements[J]. Annuals of the CIRP, 2001,50(1): 365-368. 被引量:1
  • 8[7]SIOS GmbH. Nanopositioning and nanomeasuring machine[Z]. http://www.siso.de, 2003. 被引量:1
  • 9[8]Anorad Corporation.Specification of the Piezo Ceramic Linear Motors[S]. 1998. 被引量:1
  • 10[9]Fan K C, Lin C Y , Shyu L H. Development of a low-cost focusing probe for profile measurement[J]. Measurement Science and Technology, 2000,11(1): 1-7. 被引量:1

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