摘要
一种适用于微流体系统的无阀驱动器利用印刷电路板(PCB)制作腔体以及扩散口和喷口,利用聚二甲基硅氧烷(PDMS)作为振动膜,并利用压电双晶片作为驱动部件。该驱动器的制作工艺简单,使用寿命长,具有良好的液体驱动性能。对于使用15mm长的压电双晶片制作的驱动器,在100V、60Hz、占空比为1的方波驱动下,最大流速可达l50μL/min。
A valveless driver suitable for microfluidic system is presented. The cavity, diffuser and nozzle of the driver are fabricated in the PCB. The poly-dimethylsiloxane（PDMS） is used as the diaphragm, and a piezoelectric bimorph is used as the actuator. This driver is easy to be fabricated and has a long lifetime. It can actuate in liquid stably. For a driver which has a 15 mm long piezoelectric bimorph as the actuator, a maximum flow rate of 150μL/min can be realized with 100 V, 60 Hz square wave signal which has duty ratio of 1 ： 1.
出处
《传感技术学报》
CAS
CSCD
北大核心
2008年第3期408-411,共4页
Chinese Journal of Sensors and Actuators
基金
王宽诚教育基金会资助
