摘要
研究了一种适用于微流体系统的新型无阀微泵．以单晶硅片为材料并采用微机电系统（MEMS）技术制备微泵的泵腔以及扩散口和喷口，选用弹性模量较小的聚二甲基硅氧烷（PDMS）作为泵膜，利用扁平振动马达作为驱动部件，研制出一个尺寸为12mm×12mm×6mm的无阀微泵．分别对微泵的振动频率和输出流量进行了测试，结果显示：驱动电压对微泵的频率和流量均有显著影响；当驱动电压在14～3．0V范围的时候，频率和电压成线性关系；流量随着背压的增加而减小，在零背压下，当电压为1．5V时，微泵的流量达到最大值158laL／min．
A novel valveless micropump suitable for microfluidic system was researched. The MEMS technology was adopted to fabricate the cavity, diffuser and nozzle of the micropump by using the material of mono- crystalline silicon slice. The flexible polydimethylsiloxane（PDMS） with small elastic modulus was used as the vibration membrane, and the flat vibration motor was used as the actuator. The size of the micropump is 12 mm × 12 mm × 6 mm. The vibration frequency and the flow rate of the micropump are measured, and the results show that the voltage has significant influence on them. When the driving voltage is within the range of 1.4-3.0 V, the frequency and the voltage is linear relation. The flow rate decreases with the increase of back pressure. When a voltage of 1.5 V is applied under the condition of zero back pressure, the maximum flow rate reaches to 158μL/min.
出处
《测试技术学报》
2011年第2期107-111,共5页
Journal of Test and Measurement Technology
基金
首都师范大学实验室开放基金资助(S090108)
关键词
无阀微泵
微电子机械系统
单晶硅
聚二甲基硅氧烷
扁平振动马达
valveless micropump
microelectro mechanical systems （ MEMS ）
monocrystalline silicon
PDMS
flat vibration motor
