摘要
为解决微泵截止性低和回流等问题,利用有限元分析法,建立了微小型圆形压电单晶片驱动式主动阀的结构数学模型,分析了阀口厚度和阀口间隙对阀腔内流场分布和压强损耗的影响,为优化圆形单晶片驱动式微小型主动阀泵的结构提供了依据.并且利用自身设计制作的圆形单晶片驱动式微小型主动阀压电泵(直径35mm)进行了分析验证.结果表明,在阀口厚度一定时,随着电压的升高,压电振子的振幅增大,主动阀的截止性升高,回流减少,流量升高.当阀口厚度为200μm、阀口间隙为30μm、电压为150V时,其流量达到38mL/min.
In order to resolve low cut-off and back flow of the micropump,finite element analysis was used to set up the mathematical model of a circular piezoelectric-driven unimorph micropump structure with active valve and analyze the influence of the valve port thickness and valve port gap on cavity flow field distribution and the pressure loss,providing the basis of the structure to optimize circular piezoelectric-driven unimorph micropump with active valve.Moreover,micro valve piezoelectric pump（diameter of 35 mm）was designed and fabricated by use of the circular unimorph for verification.Results show that the retardarce of active valve tends to be enhanced with larger amplitude of piezoelectric vibrator and higher voltage when the thickness value is fixed,causing the reflux decreasing,and the flux increasing.When valve port thickness was 200 μm,valve port gap was 30 μm,voltage was 150 V,the flux reached 38 mL/min.
出处
《纳米技术与精密工程》
EI
CAS
CSCD
2010年第2期183-188,共6页
Nanotechnology and Precision Engineering
基金
国家自然科学基金资助项目(50575093,50775093)
关键词
微泵
有限元分析
阀口厚度
阀口间隙
流量
micropump finite element analysis valve port thickness valve port gap flux
