摘要
文章报道了采用液相外延方法,在碲锌镉衬底上进行碲锌镉薄膜缓冲层生长的情况,并且采用X光双晶衍射仪、X光形貌仪、红外傅里叶光谱仪、二次离子质谱仪等手段对碲锌镉薄膜进行了表征,碲锌镉薄膜具有较好地组分及均匀性,晶体结构质量也较好。采用碲锌镉缓冲结构生长了碲镉汞液相外延片,其碲锌镉与碲镉汞薄膜界面附近的杂质得到了有效的控制。
This article presents the result of LPE CdZnTe on CdZnTe substrates. The CdZnTe epilayer was characterized with X-ray diffraction, X-ray topography, SIMS and FTIR. The LPE CdZnTe films on CdZnTe substrate show good composition and uniformity, good crystal quality. The impurity between HgCdTe and CdZnTe buffer layer is controlled very well by this HgCdTe/CdZnTe/CdZnTe structure.
出处
《激光与红外》
CAS
CSCD
北大核心
2007年第B09期907-909,共3页
Laser & Infrared
