摘要
分析了电容传感器的基本原理,推导了电容传感器测量小孔内径的数学模型,组建了电容传感微孔测量系统,研究了φ3mm微孔电容传感器的制作方法及测量系统的标定方法．所制作的测孔传感器经标定后,测量分辨率达到0．01μm．该测量系统操作简单,可通过USB接口、结合测量软件在计算机上直接读出微小孔的内径值．
The working principle of capacitance sensor is analyzed,its mathematical model for measuring microaperture is deduced and the system is constructed. The manufacturing process of a Ф3 mm sensor and its system calibration method are presented. After calibrated, the measurement system can give the aperture of small hole directly on the computer through USB interface combined with the software and the system resolution can reach 0.01 μm.
出处
《纳米技术与精密工程》
CAS
CSCD
2006年第2期103-106,共4页
Nanotechnology and Precision Engineering
关键词
电容传感器
微小孔径
非接触测量
标定
capacitance sensor
micro-aperture
non-contact measurement
calibration
