摘要
综述了类金刚石膜的制备方法,以及各种制备方法的基本原理和特点,并分析了各种方法对膜的结构和性能的影响。
Deposition processes of DLC films and their basie principles
and characteristics are reviewed in this paper. The effect of the process on the pro-perties of DLC films is analyzed.
出处
《材料导报》
EI
CAS
CSCD
1996年第2期38-42,共5页
Materials Reports
