摘要
综述了用等离子体法制备碳化硅超细粉的进展,并将制备方法归纳为固-固、固-气和气-气反应法。评述了研究者为提高SiC的纯度而作的努力。
In this paper,the progress of preparing SiC ultrafine powder
by using plasma process is reviewed,and the preparing methods are summed up as solid-solid,solid-gas,and gas-gas reacting processes. Attempts of researchers to im-prove the purity of SiC are commented.
出处
《材料导报》
EI
CAS
CSCD
1996年第2期34-37,共4页
Materials Reports
