期刊文献+

自由曲面光学器件检测技术(英文) 被引量:7

Inspection of Free-Form Optics
下载PDF
导出
摘要 自由曲面光学器件尽管有其突出的优点,但还远不能进入到现代光学系统的主流中去,问题之一就是精密检测.自由曲面光学器件的检测对于其精密加工不可或缺,并且两者通常具有不可分割的联系.文中阐述了与不同加工阶段相关的自由曲面光学器件检测中的问题和对策.在抛光前后宜分别采用坐标测量机和光学干涉仪,两种方法都存在一些问题有待解决.实际上坐标测量方法是近十几年来自由曲面测量的主流,这方面的研究主要集中于定位、误差补偿及采样策略等问题上.相比之下,自由曲面光学器件的光学测试是一个新的技术,其中不仅是分析软件上的存在问题,首要的还是缺乏适当的测量手段.尽管也可应用专门的轮廓测量仪,但它还存在诸多限制.结合子孔径拼接技术的干涉仪在某些自由曲面光学器件的测量中前景良好,不过对于更复杂的曲面,它同样无法进行测量. Despite their appealing advantages, free-form optics are worming their way to the mainstream of modern optical system. One of the obstacles is precision inspection. It is indispensable and usually coupled with the manufacturing process. This paper gives a survey of problems and solutions in inspection of free-form optics, associated with different manufacturing processes. Coordinate measuring machine and optical interferometer are preferred instruments before and after polishing, respectively. Problems exist in both methods. Actually coordinate measuring method has been prevailing for the recent decade for free-form surface inspection. Most attention is paid to issues such as localization, error compensation, sampling strategy, etc. In contrast, optical test of free-form optics is relatively a new technique. There are not only problems of analysis software, but first a lack of proper means. Special profilers may find applications, yet suffer a number of limitations. Interferometer combined with subaperture stitching technique is promising for inspection of some free-form optics. But it can do nothing but nail-biting when faced with complex surfaces.
出处 《纳米技术与精密工程》 CAS CSCD 2005年第2期126-136,共11页 Nanotechnology and Precision Engineering
基金 Supportedby"973"NationalFundamentalResearchGrant(51332).
  • 相关文献

参考文献3

二级参考文献19

  • 1O'Connor M Z, Srinivasan V, Jones A. Connected Lie and Symmetry Subgroups of the Rigid Motions.. Foundations and Classification. IBM Research Report RC 20512(7/26/96). 被引量:1
  • 2Li Z X, Gou J B, Chu Y X. Geometric algorithm for workpiece Localization. IEEE Trans. on Robotics and Automation, 1998, 14(6): 864~878. 被引量:1
  • 3Gou J B, Chu Y X, Li Z X. A geometric theory of form,profile and orientation tolerances, In: 14th world congress of intl. Federation of Automatic Control, July, 1999. 被引量:1
  • 4Gou J B, Chu Y X, Xiong Z H, et al. A geometric methodfor computation of datum reference frames. IEEE Trans. onRobotics and Automation, 2000, 16(6): 797~806. 被引量:1
  • 5Murray R M, Li Z X, Sastry S S. A mathematical Introduction to robotic manipulation. Florida: CRC Press, 1994. 被引量:1
  • 6Selig J M. Geometrical Methods in Robotics. New York:Springer-Verlag, 1996. 被引量:1
  • 7Boothby W. An introduction to differentiable manifolds and riemannian geometry. New York: Academic Press, 2nd Edition, 1986. 被引量:1
  • 8Onishchik A L. Lie Groups, Lie Algebras. Encyclopaedia of Mathematical Sciences, Vol.20 Heidelberg: Springer-Verlag,1993. 被引量:1
  • 9陈明仪,吴德柱,程维明.用条纹图形拼接法测量三维大物体面形[J].光学学报,1998,18(1):74-79. 被引量:17
  • 10田丰,赵宏,陈文艺,范华,谭玉山.利用空间坐标变换的三维测量系统[J].光学学报,1998,18(2):199-203. 被引量:7

共引文献51

同被引文献60

引证文献7

二级引证文献71

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部