摘要
该文介绍一种可进行动态微位移测量的自动干涉测试系统。它在接触式干涉仪的基础上，配置了光电探测、图像捕获器件及微机和干涉图处理软件包等，其动态测量范围为０～２０μｍ（可调），精度优于０．０２μｍ。文中介绍了硬件配置和干涉图的分析处理原理，并提供了对压电陶瓷堆特性曲线的精确测试实例。
An interferometric system for testing dynamic micro displacement automatically. The eyepiece of Contact Type Interferometer is instead with optic electronic detector and image acquisition device, this system is built. Its dynamic testing range varied from 0 to 20μm and precision is better than 0.02μm when a software is used to analyse interferograms. Its hardware form and the analysis principles of interferograms are given, and the characteristics of a Piezo Electric (PZT) is also given precisely.
出处
《南京理工大学学报》
EI
CAS
CSCD
1998年第2期145-148,共4页
Journal of Nanjing University of Science and Technology
基金
国防科技预研行业基金
关键词
光学干涉仪
自动化
动态测量
微位移
optical interferometers, automation, dynamic measurement, micro displacement
