摘要
基于迈克耳逊干涉原理 ,设计了一种测量装置 ,采用连续间隔幅度的测量算法 ,对小正弦振动幅度进行了测量。这个理论在研究石英晶体振动中得到证实。利用这种方法 ,参照高准确度的模型 。
A measurement system are designed on the basis of the fundamentals of Michelson interferometry,and a measureing method of small amplitude vibrations are given to calculating in continuous intervals.This theory is proved by studying the quartz crystal. In this way, vibrations with the amplitude about nanometer degree can be measured,which confers high sensitivity to the model.
出处
《传感器技术》
CSCD
北大核心
2001年第11期33-35,共3页
Journal of Transducer Technology
关键词
光学干涉仪
计算机辅助分析
振动测量
optical interferometry
computer aided analysis
vibration measurement
