摘要
以压电叠堆为驱动元件,设计了新型的步进型精密直线驱动器。驱动器由于设计了独特的双侧对称箝位结构,可以利用精调斜块准确调整箝位面与动子的配合间隙,同时采用整体加工的柔性结构,保证了工作的稳定性和准确性。应用有限元分析方法对步进型精密直线驱动器进行了力学分析,并进行了大量的试验研究。试验测试结果表明:驱动器的分辨率达到40nm、行程18mm、驱动速度达到6mm/min,可牵引150g的载荷。
A novel sophisticated stepping linear piezoelectric actuator was designed based on piezoelectric stack as actuator element. Because of used unique double symmetric anchoring/loosing, tolerance clearance between anchoring/loosing and runner is modulated precisely by using oblique blocks, meanwhile, applying flexible structure of overall structure processing ensures stability and accuracy of actuator. Mechanical properties of the stepping linear sophisticated piezoelectric actuator are analysed with finite element method and a number of experiments were carried out. The results of test suggest actuator has a resolution of 40 nm, travel of 18 mm, velocity of 6 mm/min and loading capacity of 150 g.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2005年第3期291-297,共7页
Optics and Precision Engineering
基金
国家"863"计划资助项目(No.2002AA423150)
国家自然科学基金项目(No.50475010)
关键词
直线驱动器
压电叠堆
柔性铰链
精密驱动
有限元分析
Finite element method
Flexible structures
Mechanical properties
Piezoelectric devices
