摘要
设计并研制了一种结构小巧的纳米级精密定位平台.该系统采用正交簧片式设计,有效地抑制了正交运动的耦合,同时应用一个二维电容微位移传感器作为位移标准来对定位平台实行反馈控制,有效地克服了压电陶瓷执行机的非线性和迟滞效应.实验结果表明,该系统定位精度优于1nm,可在0.5μm×0.5μm范围内实行任意二维纳米循迹定位.给出了半径为2.5nm的圆及外接圆半径约为5nm的五角星形的定位轨迹图.该系统基本满足高精度引力实验精确定位的需求.
A two-dimensional nano-positioning system combined with a two-dimensional capacitance displacement sensor is presented. Two piezoelectric actuators drive an orthotropic beryllium-copper flexure stage, and a two-dimensio-(nal) capacitance sensor with stray-immune design is used in feed-back control of the motion of the nano-positioning stage, which effectively compensates the nonlinearity and hysteresis of piezoelectric actuators. Experimental results show that the nano-positioning system can be used to draw any planar motion within a range of (0.5 μm)×0.5 μm and with a precision of below 1 nm. A circle with a radius of about 2.5 nm and a pentacle with a circumradius of 5 nm tracking are drawn by this nano-positioning system. The system can satisfy the requirement of precise positioning for gravitational experiments.
出处
《纳米技术与精密工程》
CAS
CSCD
2005年第2期137-141,共5页
Nanotechnology and Precision Engineering
基金
"973"计划资助项目(2003CB716304)
国家自然科学基金资助项目(10205005
10121503).
