摘要
研究开发了一种新型压电驱动二自由度纳米级微定位工作台。文章采用静力学理论对微动工作台的运动副进行了建模分析 ,推导出直角平行板柔性铰链的刚度计算表达式。采用有限元分析方法 ,对柔性铰链和微动工作台的静、动态力学特性数值分析 ,并对微动工作台的模态频率进行了实验测试。理论分析。
A novel 2 DOF nanopositioning stage drived by PZT is developoed.In this paper,the theory of general mechanics is used to analyse the flexure hinge of stage,and the stiffness of righ angle flexure hinge is derived.The numerical analysis on static and dynamic behavior of the hinge and the stage is carried by using the finite elements method(FEM),and the experimental analysis is performed to measure the modal frequencies of the stage.The consistency of the theory,numerical and experimental results proved the accuracy of theory model and the validity of the FEM analysis.
出处
《压电与声光》
CSCD
北大核心
2002年第1期31-34,共4页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金重点项目 (2 983 3 0 70 )
国家自然科学基金资助项目 (5 0 175 0 19)
