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压电陶瓷驱动三自由度精密移动定位微小机器人 被引量:4

3-D.O.F High Precise Mobile Positioning Microrobot with PZT Drivers
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摘要 使用压电陶瓷堆材料作为微驱动元件,设计了一种三自由度基于尺蠖蠕动原理工作的精密移动定位微小型机器人。采用显微镜作为测量元件,通过测量机器人移动时像素点位置的方法,完成了对该机器人沿X、Y方向的直线移动定位以及绕Z轴的θ角转动定位的试验测试,测试结果证明了设计的合理性与实用性。 Using PZT stacks as micro driving elements, a 3-D. O. F high precise mobile positioning microrobot based on the inch-worm driving principle is designed in this paper. In order to test characteristics of the designed microrobot, a microscope is used to measure the picture elements of the microrobot in experiments, and then, experiments about X and Y directions mobile positiorning and rotating around Z axis are done. The experimental results prove that the design is reasonable and practicable.
出处 《压电与声光》 CSCD 北大核心 2005年第4期356-358,共3页 Piezoelectrics & Acoustooptics
基金 国家"八六三"计划基金资助项目(2003AA404190)
关键词 移动定位 尺蠖蠕动 微小机器人 压电陶瓷 mobile positioning inch-worm microrobot PZT
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参考文献4

  • 1TORII Akihiro , KOYANGI Tomohiro , UEDA Akiteru. Structure of microrobots using electromagnetic actuators [J]. 1999 International Symposium On Micromechatronics And Human Science, 1999 : 235-241. 被引量:1
  • 2KATO H, HAYAKAWA K, TORII A, et al. XYθ actuator using piezoelectric and electromagnetic actuators [J]. Trans IEEE of Japan, 1999,119-c(1): 57-62. 被引量:1
  • 3BLEULER Hannes, CLAVEL Reymond, BREGUET Jean-Marc, et al. Applications of microrobotics and microhandling [J]. Focused on Science and Technology in Micro/Nano Scale, RIKEN Review, 2001 (36) :26-28. 被引量:1
  • 4CHANG Shuo - hung , TSENG Chung - kai , CHIEN Hon-chan. An ultra-precision XYθz piezo-micropositioner [J]. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1999, 46 (4) : 897-905. 被引量:1

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