摘要
本文介绍一种新型的高精度微位移测量仪器一数字式电容测微仪,它可以广泛应用于工件形状误差、尺寸参数的精密测量以及机械振动、冲击的动态测试。本文在误差分析的基础上,提出改进措施,以期提高仪器的测量精度,理论分析和实验表明改进措施是有效的。
This paper introduced a new type micro-displacement measurement instrument which has a high accuracy, called 'digital capacitive micrometer'. It can be used for the precision measurement of workpiece shape error and dimensions parameters and the dynamic tast of mechanical vibration and shock. Based on error analysis, improved methods are given for higher accuracy in the paper. Theoretical analysis and experiment show that the improving measures are effective.
出处
《光学精密工程》
EI
CAS
CSCD
1993年第6期49-54,共6页
Optics and Precision Engineering
关键词
微位移测量
测量误差
电容测微仪
Micro-displacement measurement, Measuring erroe,Frequency drift
