摘要
本文研制了一种用于微位移和振动测量的新型仪器——数字式电容测微仪,介绍了它的工作原理、性能指标以及特点,分析了电容传感器两极板不平行对测量精度的影响程度。测试表明该仪器具有体积小、精度高、成本低等优点,具有广泛的应用前景。
A new type of precision digital capactive, ve instrmnent is developed for measuring micro displacement and vibration. In this paper, its measuring principle, specifications and features are described in detail. The effect of the angle between two electrode planes of capacitive sensor on the measuring result is also analysed in it. This instrument may have the advantage of small size, low cost and high accuracy, as well as wide future.
出处
《国防科技大学学报》
EI
CAS
CSCD
北大核心
1992年第2期22-26,共5页
Journal of National University of Defense Technology
基金
国家自然科学基金
关键词
电容传感器
电容测微仪
数字式
micro-displacement, capacitive sensor, measurement
