摘要
针对非接触式电容测微技术的应用问题,介绍了非接触式高精度电容测微仪的基本工作原理及关键技术,给出了仪器的主要结构,对仪器电路进行了模块化设计,研究分析了实际测量过程中不可避免的各种误差,并提出了相应的消除或修正方法.研究结果表明,探头的有效直径为1mm时,仪器的分辨率可达1nm,测量范围为±5μm.探头的有效直径为9mm时,分辨率可降到0.1μm,测量范围可扩大到±1mm,动态频响0～4kHz.
The fundamental principle of non-contact capacitance measurement and the key technologies involved are introduced. Following the discussion of the main structure of this micrometer, the design of building block with respect to the circuit is conducted to improve performance. Inevitable errors generated in the process of measurement are analysed in detail. Against different error sources, various amendments or slaking methods are proposed. Using a probe whose effective diameter is 1 mm within the range of±5 μm, the resolution of this micrometer can reach 1 nm. Changing the sensors for those of 9 mm diameter can result in a reduced resolution of 0.1 μm with an enlarged measurement range of ±1 mm, and the dynamic response frequency reachs 0-4 kHz. This instrument can be widely used in high precision dynamic or static measurement of displacement and nano-meter locating with the interface of RS-232 or USB, and now it has already been successfully used in the online inspection of the mechanic shock, the rigidity of the gas film of the dynamic pressure motor, the thickness of oil-bound film, moisture film and plastic film.
出处
《天津大学学报（自然科学与工程技术版）》
EI
CAS
CSCD
北大核心
2004年第9期787-791,共5页
Journal of Tianjin University：Science and Technology
关键词
电容测微仪
非接触测量
误差修正
capacitance micrometer
non-contact measurement
error compensation
