摘要
在精密气浮工作台中 ,经常采用单边驱动方式 ,它避免了复杂的同步运动控制 ,但由于质心偏置也容易引起振动和不稳定性。为了消除单边驱动所带来的不利影响 ,本文从导轨气膜刚度、共振频率等几个方面提出了消除振动和不稳定性的不良影响的设计方法。
In the part of high-precision air-bearing wo rk -stage, there are two drive modes, that is, one-side drive mode and two-side drive mode, in the stage.The demand of high synchro-control precision of two-s ide drive mode makes the implement of it very difficult in engineering practice. However,the one-side mode can avoid that problem but bring in strong vibration and unstable stability. In order to eliminate the disadvantages of vibration du e to the one-side drive mode and enable it to meet the demand of engineering ap plication, the relevant mathematic model was developed and some solving methods were also proposed by analysis of the model through three aspects: the stiffness of air membrane of the tracks, resonance frequency and acceleration design curv e.
出处
《机床与液压》
北大核心
2004年第6期19-21,68,共4页
Machine Tool & Hydraulics
基金
国家高技术研究发展计划攻关项目 (2 0 0 1AA4 2 3170 )
关键词
动力学
振动
气浮工作台
精密运动
Dynamic
Vibration
Air-bearing stage
High pre cision movement
