摘要
设计了一种以直线电机进行双边驱动、以单侧气浮导向的精密运动平台,并对系统进行了动力学建模和分析,得到了系统特性与几何尺寸、质心分布之间的关系,根据系统的要求,设计合适的几何尺寸,可以优化设计出能够更好满足要求的系统结构。
An xy stage with dual linear motor driven and guided by air-bearing at one side was designed. The dynamics model was established and the dynamics performance of the stage was analyzed with different geometrical dimension and mass distribution. The system structure can be designed with proper geometrical dimension to accord with request.
出处
《机床与液压》
北大核心
2008年第9期1-2,51,共3页
Machine Tool & Hydraulics
关键词
双边驱动
精密工作台
气浮支撑
动力学
Dual-side actuators
Precision stage
Air bearing
Dynamics
