摘要
本文分析了电弧离子镀TiN涂层各工艺参数的相互关系,提出了以镀膜温度为主控参数的工艺设计思路;探讨了TiN涂层膜/基结合强度与涂层组织结构的关系和制备高结合力涂层的技术方法。
The article has analysed the relationship of each parameter in Muti-Arc TiN coating process. It raised a throughway for TiN coating technics designing that the coating temperature is the major controlled parameter in the process. It has discussed the relationship between the micro structure of film and the adhesion strength between film layer and substrate. The technology of high adhesion film producing has been probed into in the article.
出处
《机电工程技术》
2004年第5期31-33,共3页
Mechanical & Electrical Engineering Technology
基金
广东省科学技术厅工业攻关项目(2KM00612G)资助
广东省科技计划项目(2002B50701)资助
关键词
TIN涂层
电弧离电镀
结合力
工艺设计
Adhesion strength
Coating process technology
TiN film
Tools
Dies
