摘要
采用溶胶 -凝胶法在石英玻璃衬底上使用旋转涂覆技术生长了 Zn O薄膜 .对薄膜的 XRD分析表明 Zn O薄膜为纤锌矿结构并沿 c轴取向生长 .透射光谱表明薄膜的禁带宽度为 3.2 8e V ,与 Zn O体材料的禁带宽度 3.30 e V基本相同 .用光致发光谱分析了经过 5 0 0～ 70 0℃热处理获得的 Zn O薄膜 ,结果表明 Zn O薄膜在室温下有较强的紫外带边发射 ,但当热处理温度高于 70 0℃时 。
Zinc oxide films are prepared on quartz substrates by the sol-gel process using a spinning-coating technique.The ZnO films show a hexagonal wurtzite structure and c-axis orientation as observed by XRD.Optical transmittance spectra of the ZnO films indicates that the bandgap of the thin films is 3.28eV,nearly the same as that of ZnO bulk crystal.PL spectra of the ZnO thin films obtained at different processing temperatures are investigated.The results show that all ZnO thin films emit strong UV photoluminescence at room temperature,but a visible emission band appears as the processing temperature exceeding 700℃.
基金
国家重点基础研究发展规划 ( No.G2 0 0 0 0 683 )资助项目~~
